FEI扫描电子显微镜所得TIFF图片中所含实验参数信息

Experimental Parameters written in TIFF images from FEI SEM (Scanning Electronic Microscope).

FEIの走査型電子顕微鏡を利用した貰ったＴＩＦＦで写真の情報

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Use Vim or notepad opening the TIFF images, and check the terminal plain text.

Stage Tilt angle; unit, rad

e.g., TiltCorrectionAngle=0.488997 (i.e., 28 deg)

Scan Rotation angle; unit, rad

e.g., ScanRotation=-0.248 (i.e., -14 deg, inverse hour)

Work Distance; unit, meter

e.g., WorkingDistance=0.00176491 (i.e., 1.8 mm)

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Example:

Date=05/22/2013

Time=12:55:40 PM

User=support

UserText=Magellan400L

UserTextUnicode=4D006100670065006C006C0061006E003400300030004C00

[System]

Type=SEM

Dnumber=D9372

Software=4.1.4.2010

BuildNr=2010

Source=FEG

Column=Elstar

FinalLens=Elstar

Chamber=XL30SB

Stage=

Pump=TMP

ESEM=no

Aperture=AVA

Scan=PIA 2.0

Acq=PIA 2.0

EucWD=0.004

SystemType=Magellan(TM) 400L

DisplayWidth=0.373

DisplayHeight=0.303

[Beam]

HV=1000

Spot=-4

StigmatorX=-0.519744

StigmatorY=0.089469

BeamShiftX=-4.83139e-007

BeamShiftY=-5.02403e-007

ScanRotation=-0.248229

ImageMode=Normal

Beam=EBeam

Scan=EScan

[EBeam]

Source=FEG

ColumnType=Elstar

FinalLens=Elstar

Acq=PIA 2.0

Aperture=AVA

ApertureDiameter=4.53e-005

HV=1000

HFW=1.492e-006

VFW=1.28802e-006

WD=0.00176491

BeamCurrent=6.25e-012

TiltCorrectionIsOn=no

DynamicFocusIsOn=no

ScanRotation=-0.248229

LensMode=Immersion

SemOpticalMode=

ImageMode=Normal

SourceTiltX=0.0046875

SourceTiltY=-0.00976563

StageX=0.00420305

StageY=0.00737603

StageZ=0.00178479

StageR=-1.02094

StageTa=-1.27551e-005

StageTb=0

StigmatorX=-0.519744

StigmatorY=0.089469

BeamShiftX=-4.83139e-007

BeamShiftY=-5.02403e-007

EucWD=0.004

EmissionCurrent=0.000271042

TiltCorrectionAngle=-1.80698e-005

PreTilt=0

WehneltBias=

BeamMode=U-Beam

[GIS]

Number=0

[Scan]

InternalScan=true

Dwelltime=1e-007

PixelWidth=1.45703e-009

PixelHeight=1.45703e-009

HorFieldsize=1.492e-006

VerFieldsize=1.28802e-006

Average=0

Integrate=0

FrameTime=25.6726

[EScan]

Scan=PIA 2.0

InternalScan=true

Dwell=1e-007

PixelWidth=1.45703e-009

PixelHeight=1.45703e-009

HorFieldsize=1.492e-006

VerFieldsize=1.28802e-006

FrameTime=25.6726

LineTime=0.028305

Mainslock=Off

LineIntegration=255

ScanInterlacing=1

[Stage]

StageX=0.00420246

StageY=0.00737566

StageZ=0.00178479

StageR=-1.02094

StageT=-1.27551e-005

StageTb=0

SpecTilt=0

WorkingDistance=0.00176491

[Image]

DigitalContrast=1

DigitalBrightness=0

DigitalGamma=1

Average=0

Integrate=0

ResolutionX=1024

ResolutionY=884

ZoomFactor=1.0

ZoomPanX=0.5

ZoomPanY=0.5

MagCanvasRealWidth=0.29840

MagnificationMode=2

ScreenMagCanvasRealWidth=0.29840

ScreenMagnificationMode=2

PostProcessing=None

[Vacuum]

ChPressure=4.6367e-005

Gas=

UserMode=High vacuum

Humidity=

[Specimen]

Temperature=

[Detectors]

Number=1

Name=TLD

Mode=SE

[TLD]

Contrast=100

Brightness=13.67

Signal=SE

ContrastDB=82.5557

BrightnessDB=-8.71925

SuctionTube=70

Mirror=-15

MinimumDwellTime=1e-007

[Accessories]

Number=1

Name0=LoadLock

[EBeamDeceleration]

ModeOn=Off

LandingEnergy=1000

ImmersionRatio=1

StageBias=0

[PrivateFei]

BitShift=0

DataBarSelected=DateTime HV curr WD mag HFW dwell Label MicronBar

DataBarAvailable=HV srot frame dwell curr WD mag HFW x y tilt filter det DateTime mode zoom imRatio bias beamMode Label MicronBar

TimeOfCreation=22.05.2013 12:55:40

DatabarHeight=59

[HiResIllumination]

BrightFieldIsOn=

BrightFieldValue=

DarkFieldIsOn=

DarkFieldValue=