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FEI扫描电子显微镜所得TIFF图片中所含实验参数信息
Experimental Parameters written in TIFF images from FEI SEM (Scanning Electronic Microscope).
FEIの走査型電子顕微鏡を利用した貰ったTIFFで写真の情報
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Use Vim or notepad opening the TIFF images, and check the terminal plain text.
Stage Tilt angle; unit, rad
e.g., TiltCorrectionAngle=0.488997 (i.e., 28 deg)
Scan Rotation angle; unit, rad
e.g., ScanRotation=-0.248 (i.e., -14 deg, inverse hour)
Work Distance; unit, meter
e.g., WorkingDistance=0.00176491 (i.e., 1.8 mm)
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Example:
Date=05/22/2013
Time=12:55:40 PM
User=support
UserText=Magellan400L
UserTextUnicode=4D006100670065006C006C0061006E003400300030004C00
[System]
Type=SEM
Dnumber=D9372
Software=4.1.4.2010
BuildNr=2010
Source=FEG
Column=Elstar
FinalLens=Elstar
Chamber=XL30SB
Stage=
Pump=TMP
ESEM=no
Aperture=AVA
Scan=PIA 2.0
Acq=PIA 2.0
EucWD=0.004
SystemType=Magellan(TM) 400L
DisplayWidth=0.373
DisplayHeight=0.303
[Beam]
HV=1000
Spot=-4
StigmatorX=-0.519744
StigmatorY=0.089469
BeamShiftX=-4.83139e-007
BeamShiftY=-5.02403e-007
ScanRotation=-0.248229
ImageMode=Normal
Beam=EBeam
Scan=EScan
[EBeam]
Source=FEG
ColumnType=Elstar
FinalLens=Elstar
Acq=PIA 2.0
Aperture=AVA
ApertureDiameter=4.53e-005
HV=1000
HFW=1.492e-006
VFW=1.28802e-006
WD=0.00176491
BeamCurrent=6.25e-012
TiltCorrectionIsOn=no
DynamicFocusIsOn=no
ScanRotation=-0.248229
LensMode=Immersion
SemOpticalMode=
ImageMode=Normal
SourceTiltX=0.0046875
SourceTiltY=-0.00976563
StageX=0.00420305
StageY=0.00737603
StageZ=0.00178479
StageR=-1.02094
StageTa=-1.27551e-005
StageTb=0
StigmatorX=-0.519744
StigmatorY=0.089469
BeamShiftX=-4.83139e-007
BeamShiftY=-5.02403e-007
EucWD=0.004
EmissionCurrent=0.000271042
TiltCorrectionAngle=-1.80698e-005
PreTilt=0
WehneltBias=
BeamMode=U-Beam
[GIS]
Number=0
[Scan]
InternalScan=true
Dwelltime=1e-007
PixelWidth=1.45703e-009
PixelHeight=1.45703e-009
HorFieldsize=1.492e-006
VerFieldsize=1.28802e-006
Average=0
Integrate=0
FrameTime=25.6726
[EScan]
Scan=PIA 2.0
InternalScan=true
Dwell=1e-007
PixelWidth=1.45703e-009
PixelHeight=1.45703e-009
HorFieldsize=1.492e-006
VerFieldsize=1.28802e-006
FrameTime=25.6726
LineTime=0.028305
Mainslock=Off
LineIntegration=255
ScanInterlacing=1
[Stage]
StageX=0.00420246
StageY=0.00737566
StageZ=0.00178479
StageR=-1.02094
StageT=-1.27551e-005
StageTb=0
SpecTilt=0
WorkingDistance=0.00176491
[Image]
DigitalContrast=1
DigitalBrightness=0
DigitalGamma=1
Average=0
Integrate=0
ResolutionX=1024
ResolutionY=884
ZoomFactor=1.0
ZoomPanX=0.5
ZoomPanY=0.5
MagCanvasRealWidth=0.29840
MagnificationMode=2
ScreenMagCanvasRealWidth=0.29840
ScreenMagnificationMode=2
PostProcessing=None
[Vacuum]
ChPressure=4.6367e-005
Gas=
UserMode=High vacuum
Humidity=
[Specimen]
Temperature=
[Detectors]
Number=1
Name=TLD
Mode=SE
[TLD]
Contrast=100
Brightness=13.67
Signal=SE
ContrastDB=82.5557
BrightnessDB=-8.71925
SuctionTube=70
Mirror=-15
MinimumDwellTime=1e-007
[Accessories]
Number=1
Name0=LoadLock
[EBeamDeceleration]
ModeOn=Off
LandingEnergy=1000
ImmersionRatio=1
StageBias=0
[PrivateFei]
BitShift=0
DataBarSelected=DateTime HV curr WD mag HFW dwell Label MicronBar
DataBarAvailable=HV srot frame dwell curr WD mag HFW x y tilt filter det DateTime mode zoom imRatio bias beamMode Label MicronBar
TimeOfCreation=22.05.2013 12:55:40
DatabarHeight=59
[HiResIllumination]
BrightFieldIsOn=
BrightFieldValue=
DarkFieldIsOn=
DarkFieldValue=
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